Design of magnetron sputtering cathodes, magnetrons for reactive sputtering and magnetrons for flat panel display production.
Domain | ionx.de |
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Homepage URL | http://www.ionx.de |
Keywords | ionx sputtering cathodes reactive flat panel display production uhv magnetrons aas target utilization mode planar magnetron source round rectangular dual ito thin film deposition sputter circular dc dc double dual full face erosion |