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AMMT provides solutions in the field of silicon micromachining and is a premier supplier of process control equipment for wet-chemical etching of silicon, glass and quartz, possibly one of the most important fabrication processes of bulk micromachining in MEMS and microsystems technology. AMMT's fields of activity comprise anisotropic and isotropic wet etching of wafer substrates, electrochemical etch-stop techniques, porous silicon formation, electroplating, and vapor-phase release techniques for surface
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- 04.08.2010
Informationen zur Webseite
| Domain | ammt.com |
|---|---|
| Homepage URL | http://www.ammt.com |
| Keywords | ammt anisotropic etching anodization backside protection aetzdose belackung bulk micromachining chemical handling solutions chuck critical point drying dicing free release eces process electro phoretic deposition electrochemical etch stop etch-stop electroplating electropolishing electrostatic elektrochemisch engineering fused silica galvanic galvanik galvanostat glas glass hf vapor etcher et |
| Sprache | englisch |